1. Mechanical microsensors
پدیدآورنده : / M.Elwenspoek, R.J. Wiegerink
کتابخانه: Central Library and Document Center of Shahid Chamran University (Khuzestan)
موضوع : Detectors-Design and construction,Microelectromechanical systems- Design and construction,Transducers,Silicon,Micromachining
رده :
TK7875
.
E49
2001
